NOVAPURE® EGS300 Single Canister System
- Ion Implant, Etch & CVD
- 32 gallon or 37 gallon canisters
- Flow limit 240 slpm
- Lifetime typically > 3 years on Ion Implant
- Lifetime typically > 6 months on Etch
- Built in bypass
- Built in end point detector
- Blower option with inlet pressure control
- Disposable canisters
- No refill necessary
NOVASAFE®
- Mainly for Ion Implant application
- Unit installed in tool – zero footprint
- Disposable
- Usually 6 – 12 months lifetime
- Fixed global prices
- Other applications for vent gases
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03-6764586
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03-6771280 |
